Abstract:This paper presents a novel class of miniature fluxgate magnetometers fabricated on a print circuit board (PCB) substrate and electrically connected to each other similar to the current "flip chip" concept in semiconductor package. This sensor is soldered together by reversely flipping a 5 cm × 3 cm PCB substrate to the other identical one which includes dual magnetic cores, planar pick-up coils, and 3-D excitation coils constructed by planar Cu interconnections patterned on PCB substrates. Principles and analysis of the fluxgate sensor are introduced first, and followed by FEA electromagnetic modeling and simulation for the proposed sensor. Comprehensive characteristic experiments of the miniature fluxgate device exhibit favorable results in terms of sensitivity (or "responsivity" for magnetometers) and field noise spectrum. The sensor is driven and characterized by employing the improved second-harmonic detection technique that enables linear V-B correlation and responsivity verification. In addition, the double magnitude of responsivity measured under very low frequency (1 Hz) magnetic fields is experimentally demonstrated. As a result, the maximum responsivity of 593 V/T occurs at 50 kHz of excitation frequency with the second harmonic wave of excitation; however, the minimum magnetic field noise is found to be 0.05 nT/Hz(1/2) at 1 Hz under the same excitation. In comparison with other miniature planar fluxgates published to date, the fluxgate magnetic sensor with flip chip configuration offers advances in both device functionality and fabrication simplicity. More importantly, the novel design can be further extended to a silicon-based micro-fluxgate chip manufactured by emerging CMOS-MEMS technologies, thus enriching its potential range of applications in modern engineering and the consumer electronics market.

A novel CMOS magnetic field sensor array

Design of CMOS magnetic sensor integrated circuit

Cmos Magnetic Sensor Integrated Circuit with Sectorial Magfet

A CMOS Sectorial Split-Drain Magnetic Sensor IC

A CMOS Magnetic Sensor Integrated Circuits Based on the Synchronized Sampling Function of Sector MAGFET

A CMOS Magnetic Sensor Based on Synchronous Sampling Function

An Array Cmos Magnetic-Field Sensor

Compatible CMOS Sensor IC of Magnetic Sensor and Photoelectric Quadrants Sensor

Sector Split-Drain Magnetic Field-Effect Transistor Based on Standard CMOS Technology

A CMOS Hall sensor modeling with readout circuitry and microcontroller processing for magnetic detection

Halbach-Array Magnetic Coil Arrangement on CMOS Chip for Sensitivity Enhancement of Inductive Tactile Sensor

Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique

Study of A Three-Axis Digital Tunneling Resistance-Type Magnetic Sensor

A CMOS Front-End Hall Sensor Microsystem for Linear Magnetic Field Measurement With Best Tradeoff Between Sensitivity and SNR

High-sensitivity low-noise miniature fluxgate magnetometers using a flip chip conceptual design

A highly sensitive CMOS digital Hall sensor for low magnetic field applications

Development of CMOS-MEMS in-plane magnetic coils for application as a three-axis resonant magnetic sensor

An Oscillator-Based CMOS Magnetosensitive Microarray Biochip with On-Chip Inductor Optimization Methodology

Development of Multi-Axes CMOS-MEMS Resonant Magnetic Sensor Using Lorentz and Electromagnetic Forces

Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping

A New Digital Single-Axis Fluxgate Magnetometer According to the Cobalt-Based Amorphous Effects