Abstract:A modified sol-gel process for lead zirconate titanate (PZT) thin film deposition has been presented to overcome the problems of film cracking, short-circuiting and diffusion of PZT to substrate. In the modified sol-gel process, we pattern the pyrolyzed PZT thin film by wet etching before every treatment of post-annealing for crystallization. The modification brings two advantages: film cracking is eliminated due to the reduction of internal stress; PZT diffusion to substrate is avoided due to removing PZT film from the areas without Pt buffer layer before high-temperature post-annealing treatment. The modified sol-gel process is applied to fabrication of piezoelectric cantilever, which includes sputtering and patterning top and bottom electrodes, depositing PZT layer by the modified sol-gel process and releasing cantilever structure by a double side deep reaction ion etching process. After the fabrication, performances of PZT thin film such as hysteresis loop upon polarization and X-ray diffraction pattern are evaluated. Finally, resonant frequency is measured for the fabricated piezoelectric cantilever to verify its self-exited capability for future applications as micro sensors or actuators. These experimental results indicate that the modified sol-gel process for PZT deposition can greatly improve quality and yield rate of the fabrication of piezoelectric devices without causing any adverse effect.

Research of Microactuator with PZT Prepared by Sol-gel

A Novel Design and Fabrication of V Type Valve Microactuator with PZT Prepared by Sol-Gel

Research and Fabrication of a Low-Cost Valveless Micropump Based on Piezoelectric Actuation

Fabrication and characterization of MEMS piezoelectric synthetic jet actuators with bulk-micromachined PZT thick film

High Performance PZT Piezoelectric Thick Films and Micro-Technology Research of MEMS Microactuator

Process Research of Microactuator with Sputtering PZT Film

Preparation and Properties of Piezoelectric Elements by Sol-Gel Process for Micro-actuator Application

The Pdms Micro Valve Driven by Pzt Piezoelectric Actuator on the Silicon Wafer

Fabrication and Characterization of Microcantilever Integrated with PZT Thin Film Sensor and Actuator

Fabrication and Vibration Test of Micro Piezoelectric Synthetic Jet with Side Nozzle

Fabrication and Characterization of Piezoelectric Cantilever for Micro Transducers

Fabrication and FEM Analysis of a Piezoelectric Thin-Film Microactuator

Design and Fabrication of PZT Piezoelectric Thin Film Micro-switch based on Silicon

Study on Fabrication Process and Experiment of Valveless Piezoelectric Micropump Based on PZT Thin Film

PZT piezoelectric thin film valveless micropump

Fabrication and characterization of laterally-driven piezoelectric bimorph MEMS actuator with sol–gel-based high-aspect-ratio PZT structure

Fabrication of PZT microdevices using a high-yield sol-gel process

Design and Realization of PZT Micro-actuator in Micro-tensile Testing System

Fabrication of high-aspect-ratio PZT structure by nanocomposite sol-gel method for laterally-driven piezoelectric MEMS switch

Study of Polymeric MEMS Micro-Pump Actuated by PZT Bimorph

Preparation and Micro-fabrication of PZT Piezoelectric Thin Film for Micro-sensor