Abstract:A potential application for Pb(Mg1/3Nb2/3)O3-Pb(Zr0.52T{i}0.48)O3 (PMN-PZT) piezoelectric material is micro positioning and actuation for hard disk drives. And this material was developed and the processing of a piezoelectric multilayer element for stacking and co-firing Ag/Pd electroded tape casting layers was investigated. The formation mechanisms of PMN-PZT ternary solid solution prepared by the mixed oxides techniques has been characterized by differential thermal analysis (DTA) and thermal gravimetric analysis (TGA). The sintered microstructure and composition of the PMN-PZT multilayer elements were investigated by scanning electron microscope (SEM), and X-ray spectrometer (EDX). The data from DTA/TGA stress the importance of a slow debonding from room temperature to 500 ∘C. The joining of the electrode to the PMN-PZT layer confirms that the internal electrodes are well defined and is well interconnected to the PMN-PZT layer. The ferroelectric polarization-electric (P-E) hysteresis loops of the piezoelectric films were also measured. The remanent polarization and coercive field calculated from the P-E curves decreased with decreasing the number of PMN-PZT multilayer films from 10-layer to 4-layer. After that, a novel U-type micro-actuator attached to each side via piezoelectric elements was also practically measured by laser Doppler vibrometer in order to testify the driving mechanics of it. The highest displacement/voltage sensitivity of 1.496 μm/±20 V is achieved by the micro-actuator with two 10-layer elements. The corresponding resonance frequency of the sway mode is high at 12 kHz.

Structure and Electrical Properties of PMN-PZT Micro-Actuator Deposited by Tape-Casting Process

Study on Fabrication and Properties for a Novel Micro-actuated Element

Preparation and Properties of Piezoelectric Elements by Sol-Gel Process for Micro-actuator Application

Fabrication and Finite Element Analysis of Piezoelectric Thick-Film Micro-Actuator for Hard Disk Drives

Processing and Thickness Effects on the Microstructure and Electrical Properties of Sol–gel Deposited Pb(Zr, Ti)O3 Films

Composition Design of PMN-PH-PT Piezoelectric Ceramics for High-Temperature Actuator Applications

Enhancement of the piezoelectric property in PMN-PZT/PZT thin films

Design and evaluation of PZT thin-film micro-actuator for hard disk drives

Fabrication and FEM Analysis of a Piezoelectric Thin-Film Microactuator

Thickness and Processing Effects on the Composition and Actuating Force of Pb(Zr,Ti)O3 Thin-Film Micro-Actuator for Hard Disk Drives

Low-temperature co-fired PZNN-PZT multilayer piezoelectric ceramics with excellent electrical and bending properties

Design and Experiments of a Miniature Piezoelectric Actuator Using a Multilayer PZT Bimorph

The electrical properties of low-temperature sintered 0.07Pb(Sb1/2Nb1/2)O3-0.93Pb(Zr Ti1−)O3 multilayer piezoceramic actuator

Low‐temperature sintering Sm‐doped PMN–PZ–PT multilayer ceramic actuator with high strain and temperature stability

U-type Piezoelectric Thin-Film Microactuator for Hard Disk Drives

Fabrication of Piezoelectric Ceramic Micro-Actuator and Its Reliability for Hard Disk Drives

Nanoscale Insight Of High Piezoelectricity In High-T-C Pmn-Ph-Pt Ceramics

Temperature-insensitive PMN-PZ-PT ferroelectric ceramics for actuator applications

Effect of PMN Content on the Phase Structure and Electrical Properties of PMN–PZT Ceramics

Microstructures of the monomorph piezoelectric ceramic actuators with functional gradients

Microdisplacement Characteristics and Microstructures of Functionally Graded Piezoelectric Ceramic Actuator