Preparation and Properties of Piezoelectric Elements by Sol-Gel Process for Micro-actuator Application

JING Yang,LUO Jian-bin,LU Xin-chun

DOI: https://doi.org/10.3969/j.issn.1004-2474.2006.02.007

2006-01-01

Abstract:A new piezoelectric micro-actuator for positioning a magnetic head for a highdensity hard disc device has been designed,and fabricated.The PZT thin-film or thick-film was grown on Pt/Ti/SiO_2/Si substrate using a conventional or modified Sol-Gel technique and applying reactive ion etching processes to fabricate the micro-actuator.The microstructure and surface morphologies,and grain size of the PZT films were studied by X-ray diffraction,and atomic force microscopy.The results revealed that thicker(0.6~3 μm) of the PZT films grown,the larger grain size,and the lower roughness.The U-type SUS304 substrate integrated with two PZT elements was also tested and simulated in order to investigate the driving mechanics.The peak-to-peak head displacement of 1.146 μm is achieved when an alternative voltage of ±20 V is applied on a U-type micro-actuator bonding with two 3μm-thick PZT elements and the suspension response frequency higher than 22 kHz.