Design and evaluation of PZT thin-film micro-actuator for hard disk drives

Yang Jing,Jianbin Luo,Xiaoxing Yi,Xin Gu

DOI: https://doi.org/10.1016/j.sna.2004.05.006

2004-01-01

Abstract:A new thin-film PZT micro-actuator bonded to a stainless steel (SUS304) suspension for positioning a magnetic head for high-density hard disk devices has been designed, fabricated and investigated. This PZT micro-actuator in dual-stage serve system was made using a sol–gel technique deposited thin-film PZT and applying reactive ion etching processes to fabricate the micro-actuator. The SUS304 cantilever beam integrated with the PZT micro-actuator was also simulated in order to test the driving mechanics. The novel piezoelectric multi-layer micro-actuators possess a useful compromise performance in displacement, resonance frequency and generative force. The results reveal that the new design concept provides a valuable alternative for multi-layer piezoelectric actuators. When a double-layer thin-film PZT micro-actuator was used, an applied voltage of ±15V was sufficient to obtain 0.9866μm tip displacement of the cantilever beam and high-resonance frequency over 16.67kHz, yielding the required servo bandwidth (13kHz) of several kHz.