Abstract:A potential application for Pb(Mg1/3Nb2/3)O3-Pb(Zr0.52T{i}0.48)O3 (PMN-PZT) piezoelectric material is micro positioning and actuation for hard disk drives. And this material was developed and the processing of a piezoelectric multilayer element for stacking and co-firing Ag/Pd electroded tape casting layers was investigated. The formation mechanisms of PMN-PZT ternary solid solution prepared by the mixed oxides techniques has been characterized by differential thermal analysis (DTA) and thermal gravimetric analysis (TGA). The sintered microstructure and composition of the PMN-PZT multilayer elements were investigated by scanning electron microscope (SEM), and X-ray spectrometer (EDX). The data from DTA/TGA stress the importance of a slow debonding from room temperature to 500 ∘C. The joining of the electrode to the PMN-PZT layer confirms that the internal electrodes are well defined and is well interconnected to the PMN-PZT layer. The ferroelectric polarization-electric (P-E) hysteresis loops of the piezoelectric films were also measured. The remanent polarization and coercive field calculated from the P-E curves decreased with decreasing the number of PMN-PZT multilayer films from 10-layer to 4-layer. After that, a novel U-type micro-actuator attached to each side via piezoelectric elements was also practically measured by laser Doppler vibrometer in order to testify the driving mechanics of it. The highest displacement/voltage sensitivity of 1.496 μm/±20 V is achieved by the micro-actuator with two 10-layer elements. The corresponding resonance frequency of the sway mode is high at 12 kHz.

Lost Silicon Mold Process for Pzt Microstructures

Novel Processing of High Aspect Ratio 1-3 Structures of High Density PZT

Processing of PZT Microstructures

Fabrication of Lead Zirconate Titanate Microrods for 1–3 Piezocomposites Using Hot Isostatic Pressing with Silicon Molds

High Quality PZT Thick Films Using Silicon Mold Technique for MEMS Applications

Fabrication of PZT microdevices using a high-yield sol-gel process

Direct Writing Micro/Nano Structures on PZT Wafer by Laser Micromaching

Rapid Prototyping of Piezoelectric Ceramics Via Selective Laser Sintering and Gelcasting

Fabrication of porous PZT ceramics using micro-stereolithography technology

Preparation and Application of Lead Zirconate Titanate (PZT) Films Deposited by Hybrid Process: Sol-Gel Method and Laser Ablation

Preparation of Diffuser-Type Micropumps Using Pzt Thin Films Prepared by Metallo-Organic Compound Decomposition Process

Pulsed Laser Deposited Lead Zirconate Titanate Thin Films for Micro Actuators

Fabrication And Etching Processes Of Silicon-Based Pzt Thin Films

Fabrication and Characterization of Piezoelectric Cantilever for Micro Transducers

Preparation of A High-Quality Pzt Thick Film with Performance Comparable to Those of Bulk Materials for Applications in Mems

Structure and Electrical Properties of PMN-PZT Micro-Actuator Deposited by Tape-Casting Process

Deep Reactive Ion Etching of PZT Ceramics and PMN-PT Single Crystals for High Frequency Ultrasound Transducers

Gelcasting Based Solid Freeform Fabrication of Piezoelectric Ceramic Objects

PZT Piezoelectric Function Structure on Silicon Sustbrate

Deposition and Patterning Technique for Realization of PZT Thick Film Micro Actuator

Electrical and Mechanical Properties of PZT Thin Films Prepared by Hybrid Process of Sol-Gel Technique and Laser Ablation