Fabrication and characterization of deeply-etched SiO2 waveguides

Zhen Sheng,Liu Yang,Daoxin Dai,Tingting Lang,Zhechao Wang
DOI: https://doi.org/10.1109/AOE.2007.4410860
2007-01-01
Abstract:Deeply-etched SiO2 waveguide is fabricated and characterized. The fabrication process is easier than the conventional buried SiO2 waveguide. The fabricated waveguide exhibits good performances, such as low propagation loss, broad band.
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