Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Alignment of Nanoparticles Formed on the Surface of 6H-Sic Crystals Irradiated by Two Collinear Femtosecond Laser Beams

Fabrication of Nanostructures on 6H SiC Crystal Induced by Femtosecond Laser

Femtosecond Laser Nanostructuring on a 4H-Sic Surface by Tailoring the Induced Self-Assembled Nanogratings

Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams.

The Three-Level Ripples Induced by Femtosecond Laser on a 6H-Sic Single Crystal and the Formation Mechanism

Laser-induced periodic surface structures on 6H-SiC single crystals using temporally delayed femtosecond laser double-pulse trains

Laser-induced self-organized periodic nano-hole/nano-ridge structures on the surface of silicon produced with a tightly focused femtosecond pulse laser beam

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Laser microstructuring of Si surfaces for low-threshold field-electron emission

Formation of two- Or three-dimentional patterned structures of silicon nanocrystals

Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Hybrid micro/nano-structure formation by angular laser texturing of Si surface for surface enhanced Raman scattering.

Surface Birefringence of Self-Assembly Periodic Nanostructures Induced on 6H-Sic Surface by Femtosecond Laser

Coalescence and dislocation of laser induced periodic ripples on silicon by double time delayed femtosecond laser beams

Three-dimensional ordered nano-crystalline Si made by pulsed laser interference crystallization of a-Si:H/a-SiNx:H multilayers

Simultaneous Formation of Two Types of Periodic Nanostructure in ZnO Single Crystal by Femtosecond Laser Direct Irradiation

Nanopatterning of the dielectric surface by a pair of femtosecond laser pulses of different colors through a monolayer of microspheres

Femtosecond laser two-beam interference applied to 4H-SiC surface hierarchical micro-nano structure fabrication

Two-dimensional periodic surface nanotexturing of 6H-SiC by ultrashort laser pulses

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application