Abstract:In this paper, a line-scanning irradiation of <0001> 6H-SiC single crystal by a femtosecond laser focus was implemented for laser fluence of 2.2 J/cm 2 at different scanning velocities from 1000 down to 100 μm/s. The morphology of the obtained ablation lines characterized by a scanning electron microscope shows that there progressively appear three-level ripples with average period of about 222, 600 nm and that between them. Possible formation mechanisms for these three-level ripples were analyzed by numerical simulation employing finite-difference time-domain method (FDTD). Analysis shows that as Obara proposed, the interference of incident wave with the wave scattered by scratches possibly left by fine polishing is the most possible reason for inducing 222 nm-period and 600 nm-period ripples. Main discussions were focused on the orientation characteristics of ripples. Both isolated scratches and crossed scratches with different orientation angles were considered for evaluating their role in field redistribution. The detailed simulations indicate that for scratches oriented 90° with respect to laser polarization generate a pair of strongest ripple-like optical field enhancement compared to scratches with other orientation angles. It is these advantages of 90°-oriented scratch in field enhancement that make the final ripple perpendicular to laser polarization most competitive and finally left on the surface. This complements the physical picture of Obara et al. in terms of their negligence in addressing the orientation characteristics of ripples. Further FDTD simulation of the interaction of incident wave with as-formed 600 nm-period ripples shows that the optical field enhancement located between any two adjacent 600 nm-period ripples is the driving force for splitting 600 nm-period ripples into the third ripples with period between 222 and 600 nm.

Surface Birefringence of Self-Assembly Periodic Nanostructures Induced on 6H-Sic Surface by Femtosecond Laser

Laser-induced periodic surface structures on 6H-SiC single crystals using temporally delayed femtosecond laser double-pulse trains

Fabrication of Nanostructures on 6H SiC Crystal Induced by Femtosecond Laser

Femtosecond Laser Nanostructuring on a 4H-Sic Surface by Tailoring the Induced Self-Assembled Nanogratings

Two-dimensional periodic surface nanotexturing of 6H-SiC by ultrashort laser pulses

Formation Mechanisms of Uniform Arrays of Periodic Nanoparticles and Nanoripples on 6H-Sic Crystal Surface Induced by Femtosecond Laser Ablation

Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams.

Research on Periodic Structures Aroused by Femtosecond Laser Irradiation on Single-Crystalline Silicon Wafer

Cylindrically Focused Nonablative Femtosecond Laser Processing of Long‐Range Uniform Periodic Surface Structures with Tunable Diffraction Efficiency

Femtosecond Laser Induced Concentric Semi-Circular Periodic Surface Structures on Silicon Based on the Quasi-Plasmonic Annular Nanostructure.

Study of Femtosecond Laser Induced Periodic Structure on Amorphous Silicon Films and Crystallization Characteristics

Surface birefringence of regular periodic surface structures produced on glass coated with an indium tin oxide film using a low-fluence femtosecond laser through a cylindrical lens.

Enhancement Of Surface Photoconductivityin 6h-Silicon Carbide Crystal Modified By Femtosecond Laser Pulse Irradiation

Deep Investigation of Two-Dimensional Structure Arrays Formed on Si Surface

Sub-diffraction-limit Fabrication of 6H-Sic with Femtosecond Laser

Investigation of the Morphology and Structural Transformation of 6H-Sic Induced by a Single Femtosecond Laser Pulse

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Mechanism of Femtosecond-Laser-induced Periodic Nanostructure Formation on Crystalline Silicon Surface Immersed in Water

The Three-Level Ripples Induced by Femtosecond Laser on a 6H-Sic Single Crystal and the Formation Mechanism

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

High-quality structures on 4H-SiC fabricated by femtosecond laser LIPSS and chemical etching