Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams.

Fabrication of Nanostructures on 6H SiC Crystal Induced by Femtosecond Laser

Two-Dimensional Complex Nano-Micro Patterning on Gap and Znse Surface Created by the Interference of Three Femtosecond Laser Beams

Laser-induced periodic surface structures on 6H-SiC single crystals using temporally delayed femtosecond laser double-pulse trains

Periodic Microstructures Induced by Interfered Femtosecond Laser Pulses

Fabrication of Complex Nanostructures on ZnO Crystals by the Interference of Three Femtosecond Laser Beams

Phenomena and mechanisms of single beam femtosecond laser induced periodic microstructures

Femtosecond Laser Nanostructuring on a 4H-Sic Surface by Tailoring the Induced Self-Assembled Nanogratings

Multi-photon Fabrication of Two-Dimensional Periodic Structure by Three Interfered Femtosecond Laser Pulses on the Surface of the Silica Glass

Research on Periodic Structures Aroused by Femtosecond Laser Irradiation on Single-Crystalline Silicon Wafer

Self-assembled Three-Dimensional Periodic Micro-Nano Structures in Bulk Quartz Crystal Induced by Femtosecond Laser Pulses.

Femtosecond Laser Induced Concentric Semi-Circular Periodic Surface Structures on Silicon Based on the Quasi-Plasmonic Annular Nanostructure.

Formation of Periodical Sub-Micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses

Femtosecond Laser-Induced Spatial-Frequency-shifted Nanostructures by Polarization Ellipticity Modulation.

Two-dimensional microstructures induced by femtosecond vector light fields on silicon.

Formation of Array Microstructures on Silicon by Multibeam Interfered Femtosecond Laser Pulses

Surface Birefringence of Self-Assembly Periodic Nanostructures Induced on 6H-Sic Surface by Femtosecond Laser

Formation Of Two-Dimensional Periodic Microstructures By A Single Shot Of Three Interfered Femtosecond Laser Pulses On The Surface Of Silica Glass

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

Formation Mechanisms of Uniform Arrays of Periodic Nanoparticles and Nanoripples on 6H-Sic Crystal Surface Induced by Femtosecond Laser Ablation

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation