Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Two-dimensional microstructures induced by femtosecond vector light fields on silicon.

Grating-Assisted Surface Plasmons Resonance In 2d Microstructures Induced By Femtosecond Vector Fields

Femtosecond Laser Processing by Using Patterned Vector Optical Fields

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Self-formed two-dimensional near-wavelength microstructures on copper induced by multipulse femtosecond vector optical fields

Microstructures Fabricated by Dynamically Controlled Femtosecond Patterned Vector Optical Fields.

Evolution of Microstructures on Silicon Induced by Femtosecond Laser with Multiple Pulses

Silicon micro-structuring using ultra-short laser pulses

Laser-induced self-organized periodic nano-hole/nano-ridge structures on the surface of silicon produced with a tightly focused femtosecond pulse laser beam

Vortex-Controlled Morphology Conversion of Microstructures on Silicon Induced by Femtosecond Vector Vortex Beams

Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

Formation of Array Microstructures on Silicon by Multibeam Interfered Femtosecond Laser Pulses

Extreme Sub-Wavelength Structure Formation from Mid-IR Femtosecond Laser Interaction with Silicon

Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams.

Direct Femtosecond Laser Surface Structuring with Optical Vortex Beams Generated by a q-plate

High-quality micro/nano structures of 4H-SiC patterning by vector femtosecond laser

Periodic Ripple Structures on Silicon Substrates Induced by Femtosecond Laser at Various Scan Modes

Controllable Si micro-structuring by temporally modulated single-shot femtosecond pulse lithography

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Multiphoton-induced two-dimensional microstructures in dye-doped bulk materials by four-beam interference of femtosecond pulses

Fabrication of Nanostructures on 6H SiC Crystal Induced by Femtosecond Laser