Mechanical characteristic of composite thin films coated by on-line deposition on float glass

ZHAO Hongli,CAI Yongxiu,YANG Xuemei,LIU Guangli,ZHANG Fucheng
DOI: https://doi.org/10.3321/j.issn:0454-5648.2006.08.004
2006-01-01
Abstract:Composite film was prepared by on-line chemical vapor deposition on float glass. The film thickness, elastic modulus, nano-hardness and residual stress at room temperature were investigated by stepmeter, nano-indentation and X-ray diffraction. The experimental results show that the thickness of the composite film is 560.7 nm, its elastic modulus is 48.33 GPa, and its nano-hardness is 10.65 GPa. The calculated value of the residual stress is -0.19 GPa. The effect of film thickness, quantity and proportion of precursor gases, thickness and chemical composition of glass substrate on the residual stress of the thin film was discussed.
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