180Nm 4mb High Speed High Reliability Embedded SONOS Flash Memory

Liyang Pan,Dong Wu,Guangjun Yang,Lei Sun,Huiqing Pang,Jun Zhu
DOI: https://doi.org/10.1109/cicc.2006.320888
2006-01-01
Abstract:A 1.8/3.3V 4Mb (512K times 8 bit) embedded SONOS flash memory has been successfully developed and verified with 180nm CMOS logic compatible integrated technology, in which a reverse programming array architecture and a novel high speed sensing circuit with dual-phase precharge path and self-adjusted load are proposed to improve read speed. Moreover, a novel threshold voltage tracking technique is also introduced to improve the reliability. Finally, a 4.4 mm2 core size and a 0.40 mum2 (12.4F2/bit) cell size are obtained, and the test results show that the read speed and the endurance characteristics are 17ns and 105, respectively
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