Photonic Crystal Structures Fabricated By Nanosphere Lithography

Z Hao,S Han,J Wang,Y Luo

DOI: https://doi.org/10.1109/cleopr.2005.1569407

2005-01-01

Abstract:Two-dimensional photonic crystal (PC) structures have been successfully fabricated by a substrate-independent nanosphere lithography method. The air-filling factors of the PC patterns can be accurately controlled by thinning the polymer nanospheres using O-2 plasma.

What problem does this paper attempt to address?

Controllable Two-Dimensional Photonic Crystal Patterns Fabricated by Nanosphere Lithography

S Han,ZB Hao,J Wang,Y Luo

DOI: https://doi.org/10.1116/1.1978892

2005-01-01

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Abstract:Two-dimensional (2D) photonic crystal patterns have been fabricated by an improved nanosphere lithography method. By introducing an intermediary SiO2 layer between the self-assembled layer and the substrate, this method can be applied to a wide range of materials without much concern for their surface hydrophilicity. The controllability of the photonic crystal patterns has also been investigated. The air-filling factor of the photonic crystal patterns can be easily tailored by thinning the polymer nanospheres in inductively coupled O2 plasma with a controllable etch rate. Large-area ordered 512nm pitch hole array, with vertical and smooth sidewalls, has been successfully formed on a GaAs substrate, indicating the potential application in photonic crystal devices of this method.
Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

Xiaobin Xu,Qing Yang,Natcha Wattanatorn,Chuanzhen Zhao,Naihao Chiang,Steven J. Jonas,Paul S. Weiss

DOI: https://doi.org/10.1021/acsnano.7b05472

IF: 17.1

2017-01-01

ACS Nano

Abstract:While three-dimensional (3D) configurable hierarchical nanostructures have wide ranging applications in electronics, biology, and optics, finding scalable approaches remains a challenge. We report a robust and general strategy called multiple-patterning nanosphere lithography (MP-NSL) for the fabrication of periodic 3D hierarchical nanostructures in a highly scalable and tunable manner. This nanofabrication technique exploits the selected and repeated etching of polymer nanospheres that serve as resists and that can be shaped in parallel for each processing step. The application of MP-NSL enables the fabrication of periodic, vertically aligned Si nanotubes at the wafer scale with nanometer-scale control in three dimensions including outer/inner diameters, heights/hole-depths, and pitches. The MP-NSL method was utilized to construct 3D periodic hierarchical hybrid nanostructures such as multilevel solid/hollow nanotowers where the height and diameter of each level of each structure can be configured precisely as well as 3D concentric plasmonic nanodisk/nanorings with tunable optical properties on a variety of substrates.
Single-color Peripheral Photoinhibition Lithography of Nanophotonic Structures

Minfei He,Zhimin Zhang,Chun Cao,Yiwei Qiu,Xiaoming Shen,Guozun Zhou,Zixin Cai,Xinjie Sun,Xin He,Liang Xu,Xi Liu,Chenliang Ding,Yaoyu Cao,Cuifang Kuang,Xu Liu

DOI: https://doi.org/10.1186/s43074-022-00072-2

IF: 16.5

2022-01-01

PhotoniX

Abstract:Advances in direct laser writing to attain super-resolution are required to improve fabrication performance and develop potential applications for nanophotonics. In this study, a novel technique using single-color peripheral photoinhibition lithography was developed to improve the resolution of direct laser writing while preventing the chromatic aberration characteristics of conventional multicolor photoinhibition lithography, thus offering a robust tool for fabricating 2D and 3D nanophotonic structures. A minimal feature size of 36 nm and a resolution of 140 nm were achieved with a writing speed that was at least 10 times faster than existing photoinhibition lithography. Super-resolution and fast scanning enable the fabrication of spin-decoupled metasurfaces in the visible range within a printing duration of a few minutes. Finally, a subwavelength photonic crystal with a near-ultraviolet structural color was fabricated to demonstrate the potential of 3D printing. This technique is a flexible and reliable tool for fabricating ultracompact optical devices.
Fabrication of Annular Photonic Crystals by Atomic Layer Deposition and Sacrificial Etching

Junbo Feng,Yao Chen,John Blair,Hamza Kurt,Ran Hao,D. S. Citrin,Christopher J. Summers,Zhiping Zhou

DOI: https://doi.org/10.1116/1.3079662

2009-01-01

Abstract:In this article, the fabrication process of annular photonic crystals on silicon-on-insulator wafers was addressed for the first time. A self-alignment procedure for nanofabrication using atomic layer deposition and sacrificial etching was established to place accurately nanosized dielectric rods in nanosized circular air holes. Avoiding the challenging electron-beam lithography alignment, this method achieves atomic level precision and shows high stability.
Photonic Crystal Structures with Submicrometer Spatial Resolution Achieved by High-Power Femtosecond Laser-Induced Photopolymerization

HB Sun,Y Xu,M Miwa,S Matsuo,H Misawa

DOI: https://doi.org/10.1117/12.377008

2000-01-01

Abstract:We demonstrate in this paper a fabrication of three-dimensional microstructures using photopolymerization of resin by two-photon absorption. When a tightly focused laser beam was scanned in a light-curling liquid, solidified rods were formed following the trace of the scanning. If the solidification was arranged to occur along the frame of a microstructure, a designed spatial pattern would be transformed into material object. Due to a quadratic dependence of photopolymerization rate on the laser pulse energy, the size of solidified voxels was controlled down to submicrometer order. Infrared transmission measurement exhibited pronounced band gap effects from thus-fabricated photonic crystal structures.
Submicron Diamond-Lattice Photonic Crystals Produced by Two-Photon Laser Nanofabrication

K Kaneko,HB Sun,XM Duan,S Kawata

DOI: https://doi.org/10.1063/1.1610253

IF: 4

2003-01-01

Applied Physics Letters

Abstract:Diamond-lattice photonic crystal structures consisting of around 500-nm-diameter 〈111〉 rods and 580-nm-diameter photonic atoms were realized by two-photon photopolymerization. In the course of laser nanofabrication, it was found that the surface quality of elements depended on the crystal geometry, which was then interpreted as voxel floating effect arising from insufficient overlapping degree of voxels. With the solution of this issue, nearly perfect photonic lattices were obtained, from which single-period power rejection of approximately 35% was achieved. This work is an important step toward arbitrarily tailoring the density of photon states of photonic crystals according to end use by engineering cavity or crystalline geometry.
Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

Jiaqun Li,Jianfeng Yan,Lan Jiang,Jiachen Yu,Heng Guo,Liangti Qu

DOI: https://doi.org/10.1038/s41377-023-01178-3

2023-07-04

Light: Science and Applications

Abstract:Photonic crystals are utilized in many noteworthy applications like optical communications, light flow control, and quantum optics. Photonic crystal with nanoscale structure is important for the manipulation of light propagation in visible and near-infrared range. Herein, we propose a novel multi beam lithography method to fabricate photonic crystal with nanoscale structure without cracking. Using multi-beam ultrafast laser processing and etching, parallel channels with subwavelength gap are obtained in yttrium aluminum garnet crystal. Combining optical simulation based on Debye diffraction, we experimentally show the gap width of parallel channels can be controlled at nanoscale by changing phase holograms. With the superimposed phase hologram designing, functional structures of complicated channel arrays distribution can be created in crystal. Optical gratings of different periods are fabricated, which can diffract incident light in particular ways. This approach can efficiently manufacture nanostructures with controllable gap, and offer an alternative to the fabrication of complex photonic crystal for integrated photonics applications.

optics
The polarization modulation and fabrication method of two dimensional silica photonic crystals based on UV nanoimprint lithography and hot imprint

Shuai Guo,Chunhui Niu,Liang Liang,Ke Chai,Yaqing Jia,Fangyin Zhao,Ya Li,Bingsuo Zou,Ruibin Liu

DOI: https://doi.org/10.1038/srep34495

IF: 4.6

2016-10-04

Scientific Reports

Abstract:Based on a silica sol-gel technique, highly-structurally ordered silica photonic structures were fabricated by UV lithography and hot manual nanoimprint efforts, which makes large-scale fabrication of silica photonic crystals easy and results in low-cost. These photonic structures show perfect periodicity, smooth and flat surfaces and consistent aspect ratios, which are checked by scanning electron microscopy (SEM) and atomic force microscopy (AFM). In addition, glass substrates with imprinted photonic nanostructures show good diffraction performance in both transmission and reflection mode. Furthermore, the reflection efficiency can be enhanced by 5 nm Au nanoparticle coating, which does not affect the original imprint structure. Also the refractive index and dielectric constant of the imprinted silica is close to that of the dielectric layer in nanodevices. In addition, the polarization characteristics of the reflected light can be modulated by stripe nanostructures through changing the incident light angle. The experimental findings match with theoretical results, making silica photonic nanostructures functional integration layers in many optical or optoelectronic devices, such as LED and microlasers to enhance the optical performance and modulate polarization properties in an economical and large-scale way.

multidisciplinary sciences
Fabrication and Application of Two-dimension Photonic Crystals

方斌,李东升,赵岳,杨德仁

2004-01-01

Abstract:In this paper, fabrication processions and applications of two-dimension (2D) photonic crystals were reviewed. The influence of 2D photonic crystals to the optical apparatus integration was discussed in detail.
A Nano-Patterned Photonic Crystal Laser With A Dye-Doped Liquid Crystal

doohyun ko,s m morris,alexander lorenz,f castles,haider butt,d j gardiner,malik m qasim,bodo h wallikewitz,philip j w hands,t d wilkinson,g a j amaratunga,h j coles,friend richard h

DOI: https://doi.org/10.1063/1.4816243

IF: 4

2013-01-01

Applied Physics Letters

Abstract:Covering a nano-patterned titanium dioxide photonic crystal (PC) within a well-oriented film of dye-doped liquid crystal (LC), a distributed feedback laser is constructed whereby the emission characteristics can be manipulated in-situ using an electric field. This hybrid organic-inorganic structure permits simultaneous selectivity of both the beam pattern and laser wavelength by electrical addressing of the LC director. In addition, laser emission is obtained both in the plane and normal to the PC. Along with experimental data, a theoretical model is presented that is based upon an approximate calculation of the band structure of this birefringent, tuneable laser device. (C) 2013 AIP Publishing LLC.
Two-photon micromachining for functional photonic crystals

satoshi kawata,hongbo sun

DOI: https://doi.org/10.1117/12.508530

2003-01-01

Abstract:Two-photon photopolymerization, as an important laser nanofabrication scheme, is applicable to production of micromechanical and optoelectronic devices of various dimensions. Here we report our latest progress in using this technology for fabrication of functional photonic crystals, including the achievement of high reproducibility writing by using finely quantified pixels, high-fidelity shaping through shrinkage pre-compensation, and attainment of complex three-dimensional diamond-lattice structures. These works would be essential for advanced functions of photonic crystal-based polymer optoelectronic devices.
Three-Dimensional Photonic Crystal Structures Achieved with Two-Photon-Absorption Photopolymerization of Resin

HB Sun,S Matsuo,H Misawa

DOI: https://doi.org/10.1063/1.123367

IF: 4

1999-01-01

Applied Physics Letters

Abstract:Three-dimensional photonic crystal structures were fabricated with laser microfabrication techniques through two-photon-absorption photopolymerization of resin. Significant band-gap effects in the infrared wavelength region were observed from “layer-by-layer” structures.
Simulated calculation and design for fabricating three-dimensional photonic crystal structures using holographic lithography

Huan Liu,Jianquan Yao,Enbang Li

2004-01-01

Abstract:Photonic crystals are a new type of synthetic microstructure materials which have periodical refraction index variations and photonic band gaps. Different methods have been proposed and demonstrated to fabricate three-dimensional photonic crystal structures. Compared with the semiconductor and micromachining fabrication techniques, the holographic lithography method offers a number of advantages, including its ability to create large volume of periodic structures through one irradiation process, the uniformity of period, and the ease for controlling the structures. In this study, a multi-beam interference model, in which the beam intensities, polarization directions and phase delays are taken into consideration, is presented for predicting three-dimensional photonic crystal structures. The calculated results provide a useful guide for choosing proper optical parameters and photoresists to fabricate three-dimensional photonic crystal structures.
&Lt;title>formation of Photonic Crystals by Femtosecond Laser Microfabrication</title>

Hiroaki Misawa,Saulius Juodkazis,Hong‐Bo Sun,Shigeki Matsuo,Junji Nishii

DOI: https://doi.org/10.1117/12.405730

2000-01-01

Abstract:We report a novel photo-polymerization technique of well- defined three-dimensional layer-by-layer structures by two- photon absorption (TPA in resins. By changing the structural parameters such as the rod diameter, pitch )intra-rod distance in plane) and angular orientation between neighbor planes different lattice types can be accomplished. This enables a systematic investigation of optical properties of photonic crystals (PhCs) made by TPA photo-polymerization. The solidified skeleton of PhC can be utilized as a mold to infiltrate solidifiable dye. Selective removal of the solidified resin can yield in a reverse PhC structures. When the defect-layer(s) are introduced into PhC during fabrication the PhC may act as a high-quality microcavity. A defect mode has been observed for the first time in thus-fabricated structures. Laser- microexplosion fabrication is another promising technique for the PhC and optical memory applications. TO achieve an opening of a full-bandgap the media of high dielectric constant is of request (a high dielectric contrast is necessary).
Rapid fabrication of 2D and 3D photonic crystals and their inversed structures

Chih-Kai Huang,Chia-Hua Chan,Chia-Yin Chen,Yen-Ling Tsai,Chii-Chang Chen,Jin-Lin Han,Kuo-Huang Hsieh

DOI: https://doi.org/10.1088/0957-4484/18/26/265305

IF: 3.5

2007-07-04

Nanotechnology

Abstract:In this paper a new technique is proposed for the fabrication of two-dimensional (2D) and three-dimensional (3D) photonic crystals using monodisperse polystyrene microspheres as the templates. In addition, the approaches toward the creation of their corresponding inversed structures are described. The inversed structures were prepared by subjecting an introduced silica source to a sol-gel process; programmed heating was then performed to remove the template without spoiling the inversed structures. Utilizing these approaches, 2D and 3D photonic crystals and their highly ordered inversed hexagonal multilayer or monolayer structures were obtained on the substrate.
2D Surface Optical Lattice Formed by Plasmon Polaritons with Application to Nanometer-Scale Molecular Deposition

Yanning Yin,Supeng Xu,Tao Li,Yaling Yin,Yong Xia,Jianping Yin

DOI: https://doi.org/10.1038/s41598-017-08175-8

IF: 4.6

2017-01-01

Scientific Reports

Abstract:Surface plasmon polaritons, due to their tight spatial confinement and high local intensity, hold great promises in nanofabrication which is beyond the diffraction limit of conventional lithography. Here, we demonstrate theoretically the 2D surface optical lattices based on the surface plasmon polariton interference field, and the potential application to nanometer-scale molecular deposition. We present the different topologies of lattices generated by simple configurations on the substrate. By explicit theoretical derivations, we explain their formation and characteristics including field distribution, periodicity and phase dependence. We conclude that the topologies can not only possess a high stability, but also be dynamically manipulated via changing the polarization of the excitation laser. Nanometer-scale molecular deposition is simulated with these 2D lattices and discussed for improving the deposition resolution. The periodic lattice point with a width resolution of 33.2 nm can be obtained when the fullerene molecular beam is well-collimated. Our study can offer a superior alternative method to fabricate the spatially complicated 2D nanostructures, with the deposition array pitch serving as a reference standard for accurate and traceable metrology of the SI length standard.
Large-scale structural color on transparent plexiglass by nanosphere lithography combined with reactive-ion etching

Chun-Li Luo,Lin-Xin Zheng,Jun-Yi Jiao,Guo-wei Lu,Dong-Zhou Zhong,Wei-Guo Yan

DOI: https://doi.org/10.1016/j.optmat.2022.113273

IF: 3.754

2023-01-01

Optical Materials

Abstract:Structural color due to unique optical response are of much interest both for their fundamental properties and applications in photonic integrate circuits, optical biomaterials and camouflage. Nanosphere lithography combined with reactive-ion etching demonstrates a feasible strategy to achieve large-scale photonic crystals with structural color. In this work, polymethyl methacrylate (PMMA), namely plexiglass, was firstly used as photonic crystals substrate to fabricate large-area and novel nanopillar arrays via reactive-ion etching monolayer polystyrene (PS) sphere arrays. The height and diameter of plexiglass’ nanopillars can be controlled by adjusting PS size and etching time. In addition, PS sphere arrays exhibited charming structures like chrysanthemum after O2 plasma etching with higher intensity. The nanopillar arrays exhibited the tuned band-gap of such structures with different sizes and tunable resonance peaks from 350 nm to 600 nm. The fabricated nanopillar arrays have potential applications in solar cells, self-cleaning materials, photonic crystals and nonlinear optics.
Recent Progress of Lithographic Micro Fabrication by the Tpa-Induced Photopolymerization

HK Yang,MS Kim,SW Kang,KS Kim,KS Lee,SH Park,DY Yang,HJ Kong,HB Sun,S Kawata,P Fleitz

DOI: https://doi.org/10.2494/photopolymer.17.385

2004-01-01

Journal of Photopolymer Science and Technology

Abstract:Several different structures of micro-objects were fabricated by two-photon initiated photopolymerization using newly synthesized chromophore whose structures have been engineered for high two-photon activity. A raster graphics type voxel matrix scanning (VMS) scheme allowed fabrication of two-dimensional (2D) micro-object from a bitmap for-mat figure. Using this technique along with the vacuum pressure discrepancy technique, nano-precision polydimethylsiloxane (PDMS) replica has been fabricated from it original PDMS mold that was originally prepared by two-photon initiated photopolymerization of soft-resin. For better result in photonic crystal fabrication, a quantized-pixel laser writing scheme was employed. A complicated sub-micron 3D photonic lattice was fabricated with high reproducibility. In order to enhance physical/mechanical stability of resulting microobject, we have tested a new material system which consists of sol-gel precursor and photocrosslinking of soft-resin. The physical/mechanical stability of micro-object was enhanced greatly by introducing the formation of silica glass interpenetrating network with organic polymer resin.
Photonic crystals constructed by isostructural metal-organic framework films

Zhihuan Li,Jianxi Liu,Haoze Wu,Jiao Tang,Zhongyang Li,Yadong Xu,Feng Zhou,Weimin Liu

DOI: https://doi.org/10.1007/s12274-023-5505-5

IF: 9.9

2023-03-30

Nano Research

Abstract:Metal-organic framework (MOF)-on-MOF structure allows stacking various types of MOFs with different lattice constants for molecule sieving or filtering. However, the multilayered MOFs-based optical devices have incoherent interference due to the lattice-mismatch at the interface and refractive index (RI) indifference. This paper reports isostructural MOFs-based photonic crystals (PCs) designed by stacking Bragg bilayers of lattice-matched MOFs thin films through a layer-by-layer assembly method. Colloidal nanoparticles (NPs) were homogenously encapsulated in some layers of the MOFs (HKUST-1@NPs) to tune their intrinsic RI during the spraying coating process. The isostructural MOFs-based PCs were constructed on a large scale by sequentially spraying coating the low RI layer of HKUST-1 and high RI layer of HKUST-1@NPs to form the desired number of Bragg bilayers. X-ray photoelectron spectroscopy (XPS) depth profiling proved the Bragg bilayers and the homogenous encapsulation of nanomaterials in certain layers of MOFs. Bandwidth of the PCs was tailored by the thickness and RI of the Bragg bilayers, which had a great consistent with finite difference time domain (FDTD) simulation. Importantly, reflectivity of the isostructural MOFs-based PCs was up to 96%. We demonstrated high detection sensitivity for chemical sensing on the PCs, which could be advanced by encapsulating different types of nanomaterials and designing wide-band isostructural MOFs-based PCs.

materials science, multidisciplinary,chemistry, physical,physics, applied,nanoscience & nanotechnology
Adaptive Synthesis of Optical Pattern for Photonic Crystal Lithography

P. Q. Zhang,X. S. Xie,Y. F. Guan,J. Y. Zhou,K. S. Wong,L. Yan

DOI: https://doi.org/10.1007/s00340-011-4423-5

2011-01-01

Abstract:Intensity patterns for optical lithography are synthesized with phase-controlled multi-beam interference. By using a programmable spatial light modulator, reconfigurable intensity patterns can be generated and optimized to approach an objective intensity distribution. A self-adaptive annealing algorithm is applied to feedback control to obtain the predetermined intensity distribution. Typical photonic crystal with zigzag waveguides and micro-cavities are fabricated with a one-step-exposure lithographic technique.

Photonic Crystal Structures Fabricated By Nanosphere Lithography

Controllable Two-Dimensional Photonic Crystal Patterns Fabricated by Nanosphere Lithography

Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

Single-color Peripheral Photoinhibition Lithography of Nanophotonic Structures

Fabrication of Annular Photonic Crystals by Atomic Layer Deposition and Sacrificial Etching

Photonic Crystal Structures with Submicrometer Spatial Resolution Achieved by High-Power Femtosecond Laser-Induced Photopolymerization

Submicron Diamond-Lattice Photonic Crystals Produced by Two-Photon Laser Nanofabrication

Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

The polarization modulation and fabrication method of two dimensional silica photonic crystals based on UV nanoimprint lithography and hot imprint

Fabrication and Application of Two-dimension Photonic Crystals

A Nano-Patterned Photonic Crystal Laser With A Dye-Doped Liquid Crystal

Two-photon micromachining for functional photonic crystals

Three-Dimensional Photonic Crystal Structures Achieved with Two-Photon-Absorption Photopolymerization of Resin

Simulated calculation and design for fabricating three-dimensional photonic crystal structures using holographic lithography

&Lt;title&gt;formation of Photonic Crystals by Femtosecond Laser Microfabrication&lt;/title&gt;

Rapid fabrication of 2D and 3D photonic crystals and their inversed structures

2D Surface Optical Lattice Formed by Plasmon Polaritons with Application to Nanometer-Scale Molecular Deposition

Large-scale structural color on transparent plexiglass by nanosphere lithography combined with reactive-ion etching

Recent Progress of Lithographic Micro Fabrication by the Tpa-Induced Photopolymerization

Photonic crystals constructed by isostructural metal-organic framework films

Adaptive Synthesis of Optical Pattern for Photonic Crystal Lithography

&Lt;title>formation of Photonic Crystals by Femtosecond Laser Microfabrication</title>