Process Study of Fabricating Bi-layer Micro Gears through UV-LIGA Technique

Ye ZHANG,Di CHEN,Xin-xin PAN,Hua-bin FANG,Jun ZHU,Jing-quan LIU
2005-01-01
Abstract:The bi-layer micro gears have been fabricated by UV-LIGA technique using SU-8 photoresist. The max thickness of each layer can reach 450 μm. Fabrication of these bi-layer gears has been realized through three process schemes, namely separately electroforming, once-electro-forming on a seed layer and directly once-electroforming. The advantages and disadvantages of three process schemes are discussed respectively. Separately electroforming process is appropriated for the fabrication of various microstructure devices which mechanical demand is not high. Once-electroforming methods are used in cases where mechanical demand is high. The seed layer once-electroforming is appropriated for the fabrication of moulds of low aspect ratio microstructures, while the directly once-electroforming is appropriated to the high aspect ratio microstructure devices.
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