The Process Study of UV-LIGA on the Manufacture of Multilayer MEMS Structure

朱军,汪红,陈翔,陈迪,刘景全
DOI: https://doi.org/10.3969/j.issn.1004-2474.2009.05.029
2009-01-01
Abstract:The alignment precision of multilayer microstructure and the adhesion are the main two problems when the multilayer complex microstructure is manufactured by UV-LIGA technology.The two problems are analyzed and experimentally studied in this paper.Experiments reveal that the reduction of the temperature gradient is benefit to the reduction of stress and the promotion of adhesion,so it is effective to promote the align precision.
What problem does this paper attempt to address?