Valveless Micropump with Planar Channel Based on Silicon Anisotropic Etching

Zhang Guowei,Liu Xiaowei,Chen Weiping,Ni Henan,Wang Xilian
DOI: https://doi.org/10.3321/j.issn:1004-132X.2005.z1.039
2005-01-01
Abstract:The valveless micropumps with various geometric structures were designed according to the diffuser/nozzle theory. A lot of valveless micropumps were fabricated by IC and MEMS technology including anisotropic etching and anodic bonding. The pressure and flow rate of pumps were researched, and the results show that the pump pressure increase in inverse proportion to flow rate. The pressure and flow rate of micropump achieve 14.9 kPa and 558 μL/min respectively, while the angle, length, breadth and etching depth of diffuser/nozzle is 8°, 2400 μm, 150 μm and 150 μm respectively.
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