A Pzt-Driven Micropump

XH Wang,ZY Zhou,XY Ye,Y Li,WD Zhang

DOI: https://doi.org/10.1109/mhs.1998.745797

1998-01-01

Abstract:The design, fabrication and characterization of a PZT-driven micropump is presented in this paper. It consists of a chamber, a membrane, two microvalves and a driving mechanism. The thickness of the micropump membrane is 11 mu m. The micropump chamber is round with diameter of 5mm and depth of 0.4mm. The microvalves made of single crystallite silicon are used on this micropump as flow direction control elements. The dimension of the valve cover is 1.5mmx1.0mmx7.4 mu m and dimension of the valve opening is 200 mu mx200 mu m. Its capability of flow is more than 10ml/min at a pressure level of about 10kPa. The open pressure in obverse direction is less than 200Pa while the leakage of reverse direction is almost zero. The features of the microvalve fit the requirement of the micropump well. When the micropump chamber chip and two valve chips are assembled together as a micropump, this micropump is mounted on the metal base and then the PZT bimorph cantilever is mounted above the micropump membrane. The maximum flow rate of the micropump is 365 mu l/min under 100V, 20Hz square wave power supply and zero pressure fall. The back pressure is 2.38kPa and the flow control precision is better than 1 mu l.