Growth and Characterization of LiNbO3 Piezoelectric Films by Pulsed Laser Ablation
Sifang Tian,Xinli Mei,Minggang Zhao,Qianjin Wang,Xinchang Wang
DOI: https://doi.org/10.3969/j.issn.1672-7126.2012.05.03
2012-01-01
Abstract:The LiNbO3 piezoelectric ceramic films were deposited by pulsed laser ablation on substrate of the SiO2 buffered diamond/silicon.The impacts of the deposition conditions,including the laser power,target/substrate separation,and oxygen flow rate and pressure,on the microstructures and properties of the LiNbO3 films was evaluated.The LiNbO3 films were characterized with X-ray diffraction and atomic force microscopy.The results show that the target-substrate distance strongly affects the microstructures and preferred growth orientation of the LiNbO3 films.For instance,at 4 cm,the compact,uniform,smooth,and highly c-oriented films were grown with an averaged root-mean-square surface roughness of 9.5 nm.Moreover,the columnar grains were found to stand vertically on the substrate with strong interfacial adhesion.