Abstract:We have synthesized silicon nanocrystalline structures from thermal annealing of thin film amorphous silicon-based multilayers. The annealing procedure that was carried out in vacuum at temperatures up to 1100 °C is integrated in a X-ray diffraction (XRD) setup for real-time monitoring of the formation phases of the nanostructures. The microstructure of the crystallized films is investigated through experimental measurements combined with atomistic simulations of realistic nanocrystalline silicon (nc-Si) models. The multilayers consisting of uniformly alternating thicknesses of hydrogenated amorphous silicon and silicon oxide (SiO2) were deposited by plasma enhanced chemical vapor deposition on crystalline silicon and Corning glass substrates. The crystallized structure consisting of nc-Si structures embedded in an amorphous matrix were further characterized through XRD, Raman spectroscopy, and Fourier transform infrared measurements. We are able to show the different stages of nanostructure formation and how the sizes and the crystallized mass fraction can be controlled in our experimental synthesis. The crystallized silicon structures with large crystalline filling fractions exceeding 50% have been simulated with a robust classical molecular dynamics technique. The crystalline filling fractions and structural order of nc-Si obtained from this simulation are compared with our Raman and XRD measurements.

Structure and Simulation of Hydrogenated Nanocrystalline Silicon

Crystallized Silicon Nanostructures - Experimental Characterization and Atomistic Simulations

Microcrystalline And Nanocrystalline Silicon: Simulation Of Material Properties

Simulation of hydrogen evolution from nano-crystalline silicon

Bonded Hydrogen in Nanocrystalline Silicon Photovoltaic Materials: Impact on Structure and Defect Density

Theoretical Investigation of Structural Stability and Electronic Properties of Hydrogenated Silicon Nanocrystals: Size, Shape, and Surface Reconstruction

Evaluation Of Microstructures And Carrier Transport Behaviors During The Transition Process From Amorphous To Nanocrystalline Silicon Thin Films

Doping Effects in Co-deposited Mixed Phase Films of Hydrogenated Amorphous Silicon Containing Nanocrystalline Inclusions

Numerical Simulation Study for Analysis of Hydrogenated Amorphous Silicon/Crystalline Silicon Heterostructure by Reactive Molecular Dynamics Method

Characterization of the Interface Region During the Agglomeration of Silicon Nanocrystals in Silicon Dioxide

Microstructures and Characteristics of Nanosize Crystalline Silicon Films

Characteristics of Disorder and Defect in Hydrogenated Amorphous Silicon Nitride Thin Films Containing Silicon Nanograins

H-Induced Platelet And Crack Formation In Hydrogenated Epitaxial Si/Si0.98b0.02/Si Structures

Mechanisms for Metastability in Hydrogenated Amorphous Silicon

Structural Nature of Nanocrystalline Silicon

High Electron Mobility in Well Ordered and Lattice-Strained Hydrogenated Nanocrystalline Silicon

Mechanisms of Metastability in Hydrogenated Amorphous Silicon

The Structural Evolution of Hydrogenated Silicon Carbide Nanocrystals: an Approach from Bond Energy Model, Wang–Landau Method and First-Principles Studies

Microstructure, vacancies and moments of nuclear magnetic resonance of hydrogenated amorphous silicon

Atomistic Character of Nanocrystalline and Mixed Phase Silicon

Structure Of Nc-Si : H Films