Characterization of microstructure and hardness of PCVD deposited hard coatings

Shengli Ma,Jian Xu,Wanqi Jie,Kewei Xu,Maritza G J Vepřek-Heijman,Stan Vepřek
2009-01-01
Abstract:Ti1-xAlxN hard coatings have been synthesized by direct current (dc) plasma-enhanced chemical vapor deposition (PCVD). Dependences of aluminum content and annealing at elevated temperatures on the microstructure and hardness of Ti1-xAlxN coatings were investigated. The results show that plastic hardness measured by means of indentation test increases with x increasing up to 0.83 and then decreases. XRD measurements indicate that the coatings with x < 0.83 are fcc solid solution with 3 - 10 nm grain scale. When x = 0.83, relatively soft h-AlN phase is precipitated in Ti1-xAlxN coating, while the coating hardness dramatically decreases. Furthermore, the nano-crystalline structure and high hardness of the coating can keep up to 900°C, which indicates the synthesized coating having good thermal stability.
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