Numerical Simulation on the Effect of Rotation in a Czochralski Silicon Crystal Growth with a Turbulence Model

宇慧平,隋允康,张峰翊,常新安,安国平
DOI: https://doi.org/10.16553/j.cnki.issn1000-985x.2004.05.032
2004-01-01
Abstract:A turbulence model was used to simulate the Czochralski silicon crystal growth. The effects of crystal rotation, crucible rotation and the combination of crystal rotation and crucible rotation on the melt convection, oxygen transportation, turbulent kinetic energy and turbulent viscosity were studied. It is found that a crystal rotation can make the oxygen concentration more uniformly distributed at the crystal growth interface. A crucible rotation first increases turbulence viscosity and turbulence kinetic energy but decreases them after the further increase of the crucible rotation rate. The combined rotations of crystal and crucible do not decrease turbulence viscosity and turbulence kinetic energy, but they slow down the convection in the meridian plane and decrease the temperature gradient at the growth interface which are favorable to the crystal growth.
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