Simulation of Ballistic Transport Including S/D Tunneling for DG MOSFET

郑期彤,张大伟,江波,田立林,余志平
DOI: https://doi.org/10.3969/j.issn.1674-4926.2004.05.013
2004-01-01
Abstract:The source-to-drain (S/D) tunneling current is included based on the ballistic transport model in this work, using WKB method to calculate the possibility of tunneling. The device performances of DG (dual gate) MOSFETs with very thin silicon films (thickness of 1 nm) are simulated. The simulation results show that when the channel length is 10 nm, the S/D tunneling is 25% of the total off-current and 5% of the total on-current. The proportion of the S/D tunneling will be even larger with the channel length going down. Thus, it is essential to include S/D tunneling into simulations.
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