Preparation and characterization of low voltage ZnO film varistor

Hui Lü,Yueli Teng,Haibo Yin,YuanCheng Lu,Xiaoren Pan
2004-01-01
Abstract:Low Voltage ZnO film varistor was deposited by gas discharge active reaction evaporation. XRD and SEM patterns show that the film with average size of crystal grains about 50 nm is highly c-axis oriented. The effect of annealing temperature on V-I characteristic of ZnO film was studied and conducting mechanism was also discussed.
What problem does this paper attempt to address?