Micropatterning by Wettability Control of the Sio2 Surface with Ultraviolet Irradiation

L Huang,Y Zhang,JH Liao,LN Xu,N Gu,HJ Shen
DOI: https://doi.org/10.1142/s0218625x03005414
2003-01-01
Surface Review and Letters
Abstract:A new phenomenon has been described for fabrication micropatterning by changing SiO2 surface wettability with ultraviolet irradiation. The most possible reason is the elimination of surface oxygen vacancies at bridging sites. With this technique reconstructed, it may be applicable to assembly of microelectronic circuits in the future.
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