Manufacture and Research of the Linear-source Metal Atom Evaporation Device

包成玉,杜英歌,迟涛,王雅睿,张黎源,王立军,王德武
DOI: https://doi.org/10.3321/j.issn:0258-7025.2003.05.019
2003-01-01
Abstract:This paper reported a set of metal atom evaporation device of linear source. The device is composed of the following parts: stainless steel vacuum evaporation cavity, vacuum attaining system, electron gun, crucible, uniform magnetic field, push-and-pull inner worktable, water-cooling system, power supply, measure instrument and control circuit. The device has achieved its primary design targets by several test runs after installing and debugging. The vacuum degree is above 3 × 10-3 Pa. The superficial melt area reaches to 22 mm × 4 mm to gadolinium metallic material. Many experiments such as the evaporation by the electron gun, ions extraction can be carried out with this device.
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