Fabrication of Ga liquid metal ion source

Guifang Dong,Zhongyuan Yuan,Jianru Wang,Genyu Ying,Keqian Zhang
1998-01-01
Abstract:Ga liquid metal ion source is often used in focused ion beam technique. An electron bombardment process and the corresponding experimental equipment for the fabrication of this ion source are introduced. The source emitting characteristics are tested. The emitting stability is more than 95 % and the source lifetime is more than 1000 hours.
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