AuSi liquid metal ion source

Guifang Dong,Wenyun Kang,Genyu Ying,Jianru Wang
1997-01-01
Abstract:A vacuum system specially for making and analyzing AuSi LMIS was built to begin Si in beam's microfabrication research. The practical AuSi liquid metal ion source (LMIS) has been fabricated. Successful technology of making this LMIS is gained. Some basic characteristics of the source such as current-voltage relations, power-current curve, mass spectra and source's lifetime are described. Our AuSi LMIS has a column reservoir which is made of molybdenum metal. The emitting needle is a thin tungsten filament. A heater around the column reservoir is used to melt AuSi alloy. This LMIS will be set in a focused ion beam system and begin Si ion beam microfabrication research. The practical experience of making AuSi LMIS will be useful for the research of other alloy LMISs.
What problem does this paper attempt to address?