Stable Field Emission with Low Threshold Field from Amorphous Carbon Films Due to Layer-by-layer Hydrogen Plasma Annealing

J Xu,XH Huang,W Li,KJ Chen,JB Xu
DOI: https://doi.org/10.1063/1.1464211
IF: 2.877
2002-01-01
Journal of Applied Physics
Abstract:The layer-by-layer hydrogen plasma treatment method, alternatively repeating the process of nanometer thickness film deposition and hydrogen plasma chemical annealing, was applied to fabricate amorphous carbon (a-C) films. It was shown that hydrogen plasma treatment reduced the size of sp2 clusters and resulted in the increase of the optical band gap. Consequently, a stable vacuum electron emission with a low threshold field was achieved from layer-by-layer hydrogen plasma annealed a-C films compared with that from conventionally deposited samples. The threshold electric field was as low as 2 V/μm. The improvement of field emission characteristics could be attributed to the large field enhancement effect due to the inhomogeneous distribution of nanometer scale sp2 clusters.
What problem does this paper attempt to address?