Effects of Fabrication Errors on the Performance of an EDG Demultiplexer

文泓桥,石志敏,盛钟延,何赛灵,何建军
DOI: https://doi.org/10.3321/j.issn:1005-0086.2002.12.004
2002-01-01
Abstract:Various errors during the fabrication of an etched diffraction grating (EDG), such as round corner, reflecting facet perpendicularity and reflecting facet roughness are discussed. The effects of these errors on the insertion loss of the EDG are analyzed. The numerical simulation results show that when the round corner radius, the deviation angle and the roughness are 1 μm, l° and 40 nm, the corresponding loss is 1.7 dB, 0.7 dB and 1 dB respectively.
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