Y/R Model of Integrated Circuits Based on the Open Circuit Fault of Interconnections

赵天绪,郝跃,马佩军
DOI: https://doi.org/10.3321/j.issn:0372-2112.2002.11.031
2002-01-01
Tien Tzu Hsueh Pao/Acta Electronica Sinica
Abstract:Yield and reliability are two problems that are focused on semiconductor manufacturing. The researched results show that there exists a relation between yield and reliability of IC's. In order to describe this correlativity, the yield critical area and the reliability critical area are analysed based on the mechanism of open circuit of interconnections caused by manufacturing defects, and the model of relation between IC's yield and reliability is presented. Finally, the validity of this model is shown by computer simulation.
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