Abstract:Recently, there has been an increasing interest in ZnO due to its electrical, optical and piezoele-ctric properties making suitable for many applications such as light emitting diodes, photodetectors, surface acoustic waves device and so on. SAW filters with working frequency higher than 1 GHz will be widely applied in the intending wireless communication, whereas higher resonant frequencies (superior to 2.5 GHz) tend to push the limits of conventional photolithography. ZnO/diamond structure as SAW substrates offers an attractive means for relaxation of the lithographic criteria since ZnO has excellent piezoelectricity while diamond has the highest elastic and stiff coefficient and highest sound velocity. The use of ZnO based on diamond as SAW substrates offers an attractive means for relaxation of the lithographic criteria since diamond has the highest stiff coefficient and sound velocity. SAW devices have been reported based on ZnO/diamond/Si layered structures with a diamond layer of 10~100 μm deposited by chemical vapor deposition (CVD) technique. However the silicon substrate restricts the heat dissipation performance of the diamond films. In regard of actual applications, a ZnO/diamond layered structure without a silicon substrate can make full use of the outstanding thermal, elastic, and sound velocity characteristics of diamond while avoiding restriction of heat dispassion due to additional silicon substrates. High quality ZnO films are currently the foundation of device preparation and the variation of deposition technological parameters is an important factor to obtain ZnO films with high quality.In this paper, ZnO thin films have been prepared on the smooth nucleation surfaces of freestanding CVD thick diamond films by reactive radio-frequency magnetron sputtering. With the variation of O2/Ar, the growth and optical properties of the ZnO films are characterized experimentally by X-ray diffraction, room temperature photoluminescence spectra, and electron probe microanalysis and Hall measurements. The results indicate that the ZnO film deposited with a O2/Ar ratio of 1 is of c-preferred orientation and high resistivity and has the best optical property.

Structures and Electric Properties of RF Sputtered ZnO Films

Microstructure and Optical Properties of ZnO Films Deposited by Radio-frequency Reactive Magnetron Sputtering

The Effects of Oxygen Partial Pressure and Substrate Temperature on the Structural and Optical Properties of Zno Films

Structural and Optical Properties of ZnO Thin Films Grown by RF Reactive Magnetron Sputtering

Structural and Electrical Properties of ZnO Thin Film by DC Magnetron Sputtering

Structural and Optical Characterizations of ZnO Films Grown by Reactive Electron Beam Evaporation

Structural and Electrical Properties of RF Magnetic Sputtered ZnO:Al(ZAO) Thin Films

Grain Growth Behavior, Surface Morphology Evolution, Structures, and Optical Properties of Zno Thin Films Prepared by Rf Reactive Magnetron Sputtering

Structural and photoluminescent properties of ZnO films deposited by radio frequency reactive sputtering

ZnO thin films produced by the RF magnetron sputtering

Crystal Growth of Undoped ZnO Films on Si Substrates under Different Sputtering Conditions

Influence of O_2/Ar Flow Ratio on Microstructures and Photoluminescence of ZnO Films

The nano structures and optical properties of ZnO films by RF magnetron sputtering

Effects of power on properties of ZnO thin films grown by radio frequency magnetron sputtering

Fabrication and Characteristics of ZnO Thin Films Deposited by RF Sputtering on Plastic Substrates for Flexible Display

Effects of RF Power on Properties of ZnO Thin Films Grown on Si (0 0 1) Substrate by Plasma Enhanced Chemical Vapor Deposition

The Growth and Optical Properties of ZnO Films Deposited on Freestanding Thick Diamond Films

Structural and Optoelectronic Properties of AZO Thin Films Prepared by RF Magnetron Sputtering at Room Temperature

Structural and optical properties of ZnO films grown on the AAO templates

Structural evolution of ZnO films deposited by rf magnetron sputtering on glass substrate

&Lt;title>the Nanostructures and Optical Properties of ZnO Films by RF Magnetron Sputtering</title>