Surface Defects on Mbe Grown Hgcdte

L Chen,Y Wu,MF Yu,SL Wang,YM Qiao,L He
DOI: https://doi.org/10.3321/j.issn:1001-9014.2001.06.002
2001-01-01
JOURNAL OF INFRARED AND MILLIMETER WAVES
Abstract:The surface defects on MBE-grown HgCdTe films on GaAs substrates were studied. The mechanism of surface defect formation was analyzed by SEM observations. The optimal growth conditions for obtaining a good morphological surface were determined. It was found that a variety of surface defects an epilayers are related to the HgCdTe growth conditions and the substrate surface treatment. The average density of surface defects (larger than 2 mum) for HgCdTe epilayers was obtained to be 300 cm(-2), and the yield was 65%.
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