C-V CHARACTERISTICS OF Bi_2Ti_2O_7 THIN FILMS ON N-Si(100)

SW Wang,W Lu,H Wang,D Wang,M Wang,XC Shen
DOI: https://doi.org/10.7498/aps.50.2461
IF: 0.906
2001-01-01
Acta Physica Sinica
Abstract:We report the growth of Bi 2Ti 2O 7 thin films on n type Si substrates by the chemical solution decomposition technique. Both the X ray double-crystal diffraction and atomic force micro spectroscopy measurements are used to check the film properties. It is shown that the film is a multi crystal film dominated by the Bi 2Ti 2O 7 phase. The C V measurements are also performed on Au/Bi 2Ti 2O 7/n Si(100) MOS structure. It is revealed that both the fixed and mobile negative charges are contained in the film. The mobile negative charge results in the hysteresis loops on C V curve.
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