PROGRESS OF STUDY ON MICROSCALE THERMAL PROPERTIES OF MICRO-ELECTRO-MECHANICAL SYSTEMS

余隽,唐祯安,魏广芬

DOI: https://doi.org/10.16579/j.issn.1001.9669.2001.04.015

2001-01-01

Abstract:Micro-electro-mechanical systems (MEMS) are the micro-mechatronics fabricated by microelectronic technology and micromachining. The thickness of thin films in MEMS can meet micrometers, submicrometers, and even nanometers. Because of microscale effect, thermophysical properties (such as specific heat, thermal conductivity and thermal diffusivity) and heat transfer rule of thin-film materials are remarkably different from that of bulk materials. Microscale effect must be carefully concerned and reasonable thermophysical properties value must be used in the design of MEMS to ensure thermal stability of MEMS and micro devises. This paper summarizes the progress of study on thermal properties of microscale thin-films in three sides of theoretical modeling, experimental testing and computer simulation, respectively. For the theoretical modeling, this paper reviews the history form Fourier analysis to non-Fourier analysis, then to the Casimir model, and lastly, to the general Fourier law that includes time relaxations for both of temperature and heat flux. On the other hand, form statistics point of view, the role of Boltzmann equation (BTE) is emphasized to the study of heat transfer in microscale. Based BTE, some hypothesizes such as phonon-electron interaction model, phonon scattering model, thermal wave model, and so on are introduced. The transport regimes for three common energy carders, electron, photon, and phonon, are also shown in this paper. For the experimental measurement of thermal properties of thin-films, short laser pulse, 3ω, microcalorimeter, and some other methods are illustrated. For computer simulations, molecular dynamics and Monte Carlo analysis are simply presented.