Abstract:Micro-electro-mechanical systems (MEMS) are the micro-mechatronics fabricated by microelectronic technology and micromachining. The thickness of thin films in MEMS can meet micrometers, submicrometers, and even nanometers. Because of microscale effect, thermophysical properties (such as specific heat, thermal conductivity and thermal diffusivity) and heat transfer rule of thin-film materials are remarkably different from that of bulk materials. Microscale effect must be carefully concerned and reasonable thermophysical properties value must be used in the design of MEMS to ensure thermal stability of MEMS and micro devises. This paper summarizes the progress of study on thermal properties of microscale thin-films in three sides of theoretical modeling, experimental testing and computer simulation, respectively. For the theoretical modeling, this paper reviews the history form Fourier analysis to non-Fourier analysis, then to the Casimir model, and lastly, to the general Fourier law that includes time relaxations for both of temperature and heat flux. On the other hand, form statistics point of view, the role of Boltzmann equation (BTE) is emphasized to the study of heat transfer in microscale. Based BTE, some hypothesizes such as phonon-electron interaction model, phonon scattering model, thermal wave model, and so on are introduced. The transport regimes for three common energy carders, electron, photon, and phonon, are also shown in this paper. For the experimental measurement of thermal properties of thin-films, short laser pulse, 3ω, microcalorimeter, and some other methods are illustrated. For computer simulations, molecular dynamics and Monte Carlo analysis are simply presented.

Experimental Researches on Thermal Properties of Dielectric Thin Films with Weak Mechanical Intensity

Heat Transport in Thin Dielectric Films

Measurement of the Thermal Transport Properties of Dielectric Thin Films Using the Micro-Raman Method

Measurement and Analysis of Thermal Properties of Sinx Thin Films

THIN-FILM MATERIALS AND MINIMUM THERMAL CONDUCTIVITY

Thermal-Conductivity of Sputtered Oxide-Films

Thermal characterization of thin films: A chip-based approach for in-plane property analysis

Thermal conductivity of amorphous SiO2 thin film: A molecular dynamics study

Experimental study on thermal conductivity of SiO2 thin film

Molecular dynamics simulation of specific heat capacities of SiO2 thin films

Research On Thermal Conductivity Measurement Of Submicrometer-Scale Silicon Dioxide Film In Thermal Flow Sensor By Micro-Raman Technique

METHOD OF DETERMINATION OF THERMAL CONDUCTIVITY AND EMISSIVITY OF ELECTRONIC THIN FILMS

Interface thermal conductance and the thermal conductivity of multilayer thin films

PROGRESS OF STUDY ON MICROSCALE THERMAL PROPERTIES OF MICRO-ELECTRO-MECHANICAL SYSTEMS

Measurement of In-Plane Thermal Conductivity of Ultrathin Films Using Micro-Raman Spectroscopy

Thermal conductivity of amorphous and crystalline thin films by molecular dynamics simulation

Study of the Dielectrostriction Coefficient of Thermal SiO2 Subjected to the Uniaxial Stress

Thermal Conductivity Measurements of Ultra-Thin Single Crystal Silicon Films Using Improved Structure

Thermal Conductivity Measurement of Amorphous Dielectric Multilayers for Phase-Change Memory Power Reduction

Measurement of Thermal Diffusivity of Thin Film in Thickness Direction Using an Ordinary Dielectric Film As the Sensor

Thermal Studies of Nanoporous Si Films with Pitches on the Order of 100 Nm -Comparison Between Different Pore-Drilling Techniques.