Equivalent Doping Transformation Method for Predicting Breakdown Voltage and Peak Field at Breakdown of Epitaxial-Diffused Punch-Through Junction

HE Jin,ZHANG Xing,HUANG Ru,WANG Yang-Yuan
DOI: https://doi.org/10.3969/j.issn.1674-4926.2001.03.002
2001-01-01
Journal of Semiconductors
Abstract:Based on a new semi empirical analytical method, namely equivalent doping transformation, the breakdown voltage and the peak field of the epitaxial diffused punch through junction have been obtained. The basic principle of this method is introduced and a set of breakdown voltage and peak field plots are provided for the optimum design of the low voltage power devices. It shows that the analytical results coincide with the previous numerical simulation well.
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