Mechanism of Metal Induced Lateral Crystallization

金仲和,王跃林
DOI: https://doi.org/10.3321/j.issn:0372-2112.2001.08.019
2001-01-01
Abstract:Research on the velocity of the metal induced lateral crystallization (MILC) is reported in this paper. The velocity of MILC is found to decrease with the exten ded annealing time. One reason is the change of the a-Si during the extended an nealing. Another reason is that the Ni diffusion through the MILC area to the MI LC front plays an important role in MILC.A new mechanism of MIC and MILC is prop osed to explain the observed phenomena.
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