Investigation on the Interface Preparation and Properties of PCVD TiN Film

He Huang,Xiaodong Zhu,Kewei Xu,JiaWen He

DOI: https://doi.org/10.3321/j.issn:1002-185x.1999.06.015

1999-01-01

Rare Metal Materials and Engineering

Abstract:In this study effort is focused on the interface preparation. Ar ion bombardment was employed at the beginning of the coating process when the coated layer was less than one hundred nano-meter thick. Sudden stoping of the in-flow of TiCl4 followed by high energy Ar ion bombardment can help the chamber recover to its designated temperature and build up to its normal plasma intensity. The high energy Ar ions are also good to densify the layer and decrease residual chlorine content. The experimental results show that when the process above is used instead of the more usual film-making process, the bonding strength of film is much higher, and the wear resistance of film is improved. The corrosion resistance of film is even better than that of stainless steel.