Improvement on Theoretical Model for Thin-Wire and Slot Measurement by Optical Diffraction

W Tang,Y Zhou,J Zhang
DOI: https://doi.org/10.1088/0957-0233/10/11/401
IF: 2.398
1999-01-01
Measurement Science and Technology
Abstract:The customary model, that is, bsin = m, for the measurement of the sizes of slots and thin wires by optical diffraction has been used widely for a long time. In this design note, the model is analysed theoretically and experimentally and improved to the new model, btan = m. Two calibrating slots and thin wires (thin cylinders) are measured by means of optical diffraction. The results show that the new model btan = m is more suitable for describing optical diffraction phenomena and more accurate for measuring a thin wire's diameter.
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