Theoretical improvement and experimental design of prism coupler

Bing-gang XIAO,Jun HU
DOI: https://doi.org/10.3785/j.issn.1008-973X.2007.12.019
2007-01-01
Abstract:The measurement principle and experimental design of a normal prism coupler were discussed in order to accurately measure the film thickness and refractive index. The theoretical errors of a normal prism coupler measurement model were investigated, then an accurate model was presented through improving the measurement theory. The convenient method for calculating the thickness and refractive index of a dielectric film was given and its theoretical errors were analyzed. The method was proved by propagating matrix method. With the specially designed experiment equipment, the thickness and refractive index of a Su-8 film on glass substrate by spinning coating were measured using the accurate model. The results showed that the precision measurement model improves the measurement accuracy.
What problem does this paper attempt to address?