Total Dose Radiation Effects of Pt/Pzt/Pt Ferroelectric Capacitors Fabricated by Pld Method

JX Gao,LR Zheng,BP Huang,ZT Song,LX Yang,YJ Fan,DZ Zhu,CL Lin
DOI: https://doi.org/10.1088/0268-1242/14/9/315
IF: 2.048
1999-01-01
Semiconductor Science and Technology
Abstract:In order to study total dose radiation effects of PbZrxTi1-xO3 (PZT) film made with the pulsed excimer laser deposition (PLD) technique, hysteresis loops and capacitance-voltage (C-V) curves of PZT film capacitors have been measured before and after gamma-ray irradiation. The results show that, in a range of 0-2 x 10(5) Gy (Si), with increasing total dose, the remanent polarization 2P(r) increased while dielectric constant epsilon decreased. This can be explained by charges trapped by some defects during irradiation.
What problem does this paper attempt to address?