ADXPS study on electromigration behavior of Au/Si3N4 system

Weijie Song,Yongfa Zhu,LiLi Cao
1999-01-01
Abstract:The electromigration behavior of the ultra thin Au films grown on Si3N4 substrate was studied with ADXPS (Angle Dependent X-ray Photoelectron Spectroscopy) and AFM (Atomic Force Microscopy). The electric field is responsible for the microstructure variations of the films surface, including finer and Au grain size, more uniform film layers and low surface roughness. Au films strongly interact with the Si3N4 substrate at the interfaces in the electromigration and AuSix is formed.
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