The microtribology and self-lubrication microsystems

YC Tian,G Liu,YL Hong,SJ Fu,YG Hu
DOI: https://doi.org/10.1117/12.324065
1998-01-01
Abstract:The microtribology phenomena on the micro contact( or slide) surface, where the effects of surface forces are more significant than those of gravity, is very different with the conventional machine. The friction force that works on a friction face of a microsystems is significantly high relative to the size of the machine, the fluid lubrication in the conventional size mechanical parts cannot reduce the friction force on the microsystems, the solid lubrication (self-lubrication) should be applied to reduce the friction force. In this paper, the solid lubrication MoS2 was studied. MoS2 is embedded into the Ni structure in electroforming process. The results show that MoS2 can be used as the solid lubrication in the microsystem to reduce the friction force and enhance the hardness of microsystem.
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