Interface study of CVD diamond films grown on molybdenum

Mingjiang Dai,Tongchun Kuang,DeZheng Wang,Kesong Zhou,ZhengYi Liu
1998-01-01
Abstract:Interfacial morphologies and composition of the diamond films deposited on molybdenum substrates have been studied by means of optical microscopy, SEM, EDAX. The results show that there exist the intermediate layers in the thickness between diamond films and molybdenum substrates of applying magnetic field. The diamond film synthesized with magnetic field is denser. The particle size is smaller and there are little voids or micro-voids between diamond particles and interface, and there are some Mo2C particles adhered on the backside of diamond film. The adhesion property of diamond film deposited with magnetic field is better.
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