Blue light emission from silicon based SiO2 thin films prepared by pulsed laser deposition

Xiangqin Zheng,XinLi Guo,Liangsheng Liao,Zhiguo Liu
1998-01-01
Abstract:Excimer laser was used to ablate silicon from silicon target in oxygen containing atmosphere. The reactant was deposited on the crystal silicon wafers. X-Ray photoelectron spectroscopy, transmission electron microscopy and photoluminescence measurements were used to characterize the deposited films. The results show that the deposited films are amorphous silicon dioxide containing polycrystal silicon particles with micrometer dimension. Blue photoluminescence is observed in the wavelength range of about 440 nm. A plausible recognition suggests that it is arisen from oxygen deficiency defect in SiOx matrix.
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