Hardness Measurement of Thin Films: Separation from Composite Hardness

JL He,WZ Li,HD Li
DOI: https://doi.org/10.1063/1.117595
IF: 4
1996-01-01
Applied Physics Letters
Abstract:A composite hardness model based on the function of depth weight factor is presented. The model can be applied to determine the characteristic hardness of surface coatings which are too thin for the hardness to be directly measured. Its application requires only composite hardness data obtained from coated specimens by conventional microhardness measurement. DLC, TiN, and Cu films on substrates of glass, silicon, and AISI 52100 steel were used to verify this composite hardness model. It proved valid for a variety of cases.
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