Second-harmonic photoacoustic imaging of dynamic integrated circuits

JianWen Fang,Shuyi Zhang,Jianchun Cheng
1996-01-01
Progress in Natural Science
Abstract:The second-harmonic (SH) photoacoustic imaging of dynamic integrated circuits has been obtained. The physical mechanisms of the SH imaging is investigated theoretically and experimentally. It is shown that the second-harmonic imaging is a useful tool for determining the semiconductor materials and devices.
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