Abstract:To improve the precision and homogeneity for mass-production of HFCVD diamond coated milling tools, the simulation of substrate temperature field generated by the HFCVD setup was conducted, adopting a 3D simulation model well in accordance with the actual equipment. Firstly, the deviation of the simulation model is assessed by comparing the simulated temperature and measured temperature based on a validation test. The comprehensive influences of various critical setup parameters on the fabrication of diamond coatings are illustrated systematically according to the Taguchi simulation scheme (L16, five factors and four levels), including the filament diameter d, the filament temperature Tf, the separation between two adjacent filaments D, the filament height H, and the material of sample holder M, in order to obtain an optimal HFCVD setup. The results indicate that filament diameter d and the separation between two adjacent filaments D can effectively contribute to adjusting the average temperature; the distance between filaments and tool tips H, and the material of sample holder M exhibit remarkable effects on the temperature uniformity; the filament temperature Tf shows obvious influences on both the average temperature and the temperature uniformity. Furthermore, the optimal HFCVD setup has been proposed, based on which a more uniform temperature field around all the tool tips can be acquired, contributing to the mass-production of high-quality and high-precision diamond coated milling tools. Afterwards, the mass-production experiments of depositing MCD and NCD diamond coatings on WC-6% Co milling tools were conducted in the actual HFCVD reactor, and tool-tip temperature were measured, revealing that the optimal setup can produce an extremely uniform temperature field. Moreover, the characterizations and cutting performances of MCD and NCD diamond coatings deposited on milling tools were evaluated, indicating that high-quality and high-precision diamond coatings with quite satisfactory homogeneity of thickness, surface and cross-sectional morphologies, chemical compositions and phases can be acquired during mass-production of diamond coated milling tools on the base of the optimal HFCVD setup.

Simulation of Temperature Distribution in HFCVD Diamond Films Growth on WC-Co Drill Tools in Large Quantities

Simulation and experimental studies on substrate temperature and gas density field in HFCVD diamond films growth on WC-Co drill tools

Simulation and experimental research on the substrate temperature distribution in HFCVD diamond film growth on the inner hole surface

Simulation and Experimental Researches on the Substrate Temperature Distribution of the Large-Capacity HFCVD Setup for Mass-Production of Diamond Coated Milling Tools

Simulation of Temperature Distribution in HFCVD Diamond Films Growth on the Multitudinous Micro End Mills

SIMULATION OPTIMIZATION OF THE HEAT TRANSFER CONDITIONS IN HFCVD DIAMOND FILM GROWTH INSIDE HOLES

Simulation and experimental research on substrate temperature distribution in HFCVD diamond film growth on seal s end surface

Simulation of Substrate Temperature Distribution in Diamond Films Growth on Cemented Carbide Inserts by Hot Filament Cvd

Optimization on the Hfcvd Setup for the Mass-Production of Diamond-Coated Micro-Tools Based on the Fvm Temperature Simulation

Simulation of Temperature Distribution in HFCVD Diamond Films Growth on the End Surfaces of Seals

Simulation of Substrate Temperature Distribution in Diamond Films Growth on Silicon Wafer by Hot Filament CVD

A Simulation Study on the Effect of Filament Spacing on the Temperature Field Uniformity of an HFCVD System

Simulation of Temperature Field in the Deposition of Diamond by Hot Filament CVD

Modeling Of Two-Dimensional Dynamic Temperature Distribution Of A Lpcvd Process And Control Design By Mpc

SIMULATION-BASED OPTIMAL DESIGN OF HFCVD EQUIPMENT ADOPTED FOR MASS PRODUCTION OF DIAMOND FILMS ON INNER-HOLE SURFACES

Influence of the Heat Dissipation Mode of Long-Flute Cutting Tools on Temperature Distribution During HFCVD Diamond Films

Simulation And Experimental Research Studies On Temperature Field For The Production Of Diamond-Coated Milling Tools By Hfcvd Device With Separated Worktables

Simulation of Temperature Distribution in Hot Filament Chemical Vapor Deposition Diamond Films Growth on Si C Seals

Simulation of Temperature Field in the Growth of Diamond Crystals by Hot Filament CVD and Experimental Study

Development of HFCVD apparatus for synthesizing diamond films with low thermal budget

Numerical Analysis of Substrate Temperature Distribution in Diamond Film Growth by Hot-Filament Chemical Vapor Deposition