Demonstration of a highly efficient multimode interference based silicon waveguide crossing

Xianyao Li,Hao Xu,Xi Xiao,Zhiyong Li,Jinzhong Yu,Yude Yu
DOI: https://doi.org/10.1016/j.optcom.2013.08.021
IF: 2.4
2014-01-01
Optics Communications
Abstract:We present the design, fabrication and characterization of a highly efficient silicon waveguide crossing based on multimode interference (MMI). The crossing is formed by only one step etching with the grating couplers on a silicon-on-insulator (SOI) platform. High transmission efficiency of 98.5% (loss of −0.07dB) and low crosstalk (<−43dB) are predicted by the 3D FDTD simulation. Our experiment results showed good agreement with the simulation and, loss of −0.1dB per crossing, and crosstalk better than −40dB was obtained over a broad optical spectrum from 1520nm to 1580nm. Such a low loss, low crosstalk waveguide crossing is suitable for future on-chip optical interconnect.
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